Minh, Phan Ngoc. <br/><br/>
Fabrication of silicon microprobes for optical near-field applications  [electronic resource] / 
Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi. 
 - Boca Raton, Fla. :  CRC Press,  c2002. 
 - 180 p. :  ill. ;  25 cm. 
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<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0849311543 
<br/><br/><label>LCCN: </label>2001-043935 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micromachining.<br/>Silicon.<br/>Near-field microscopy.<br/>Microprobe analysis.
<br/><br/><label>Dewey Class. No.: </label>621.36