Optical inspection of microsystems  [electronic resource] / 
edited by Wolfgang Osten 
 - Boca Raton, FL :  CRC/Taylor & Francis,  c2007 
 - Optical science and engineering ;  109 .
 - Optical science and engineering (Boca Raton, Fla.) ;  109 .
<br/><br/> Access to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849336821 9780849336829 
<br/><br/><label>LCCN: </label>2005-046670 
<br/><br/><label>Nat. Bib. No.: </label>GBA612882  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label>013375896  Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Quality control--Optical methods<br/>Optical detectors--Industrial applications<br/>Microelectronics
<br/><br/><label>Dewey Class. No.: </label>670.42/5