Defects in microelectronic materials and devices - Fleetwood, D. M. (Dan M.); Pantelides, Sokrates T.; Schrimpf, Ronald Donald (Boca Raton : CRC Press, 2009)
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Includes bibliographical references and index
Keywords: Microelectronics -- Materials -- Testing; Metal oxide semiconductor field-effect transistors -- Testing; Integrated circuits -- Defects