Defects in microelectronic materials and devices  [electronic resource] / 
edited by Daniel M. Fleetwood, Sokrates T. Pantelides, Ronald D. Schrimpf 
 - Boca Raton :  CRC Press,  c2009 
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<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781420043761 
<br/><br/><label>LCCN: </label>2008-018722 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials--Testing<br/>Metal oxide semiconductor field-effect transistors--Testing<br/>Integrated circuits--Defects
<br/><br/><label>Dewey Class. No.: </label>621.381