TY  - BOOK
AU  - Yao,Nan
TI  - Focused ion beam systems: basics and applications 
SN  - 9780521831994 (hbk.)
PY  - 2007///
CY  - Cambridge
PB  - Cambridge University Press
KW  - Focused ion beams
KW  - Industrial applications
KW  - Ion bombardment
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0806/2007300349-t.html
ER  -