TY  - BOOK
AU  - Meyyappan,M.
TI  - Computational modeling in semiconductor processing
SN  - 0890067074
PY  - 1995///
CY  - Norwood, MA.
PB  - Artech House
KW  - Process control
KW  - Mathematical models
KW  - Semiconductors
KW  - Design and construction
KW  - Data processing
KW  - Semiconductor industry
ER  -