Computational modeling in semiconductor processing / 
M. Meyyappan, editor 
 - Norwood, MA. :  Artech House,  1995 
 - x, 363 p. :  ill. ;  23 cm. 
<br/><br/><label>ISBN: </label>0890067074  RM281.41 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Process control--Mathematical models<br/>Semiconductors--Design and construction--Data processing<br/>Semiconductor industry