TY  - BOOK
AU  - Hoffmann,K.-H.
TI  - Functional micro- and nanosystems: proceedings of the 4th caesarium, Bonn, June 16-18, 2003 
SN  - 354021612X (hb)
PY  - 2004///
CY  - Berlin
PB  - Springer
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Microstructure
KW  - Nanostructured materials
N1  - Includes bibliographical references
UR  - http://www.loc.gov/catdir/enhancements/fy0818/2004103587-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0818/2004103587-t.html
ER  -