Functional micro- and nanosystems : proceedings of the 4th caesarium, Bonn, June 16-18, 2003 - Hoffmann, K.-H. (Karl-Heinz) (Berlin : Springer, 2004)
Includes bibliographical references
Keywords: Microelectromechanical systems -- Congresses; Microstructure -- Congresses; Nanostructured materials -- Congresses