Functional micro- and nanosystems :  proceedings of the 4th caesarium, Bonn, June 16-18, 2003 / 
Karl-Heinz Hoffmann, editor 
 - Berlin  :  Springer,  2004 
 - viii, 131 p. :  ill. (some col.) ;  24 cm. 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>354021612X (hb) 9783540216124  RM420.72 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Microstructure--Congresses<br/>Nanostructured materials--Congresses