TY  - BOOK
AU  - Ehmann,K.F.
ED  - SpringerLink (Online service)
TI  - Micromanufacturing: international research and development 
SN  - 9781402059490 (electronic bk.)
PY  - 2007///
CY  - Dordrecht
PB  - Springer
KW  - Microfabrication
KW  - Micromachining
KW  - Engineering
KW  - Electronics and Microelectronics, Instrumentation
KW  - Engineering Design
KW  - Engineering Economics, Organization, Logistics, Marketing
KW  - Machinery and Machine Elements
KW  - Manufacturing, Machines, Tools
N1  - 'WTEC'--Cover; Includes bibliographical references
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-1-4020-5949-0
ER  -