TY  - BOOK
AU  - Yoshimura,Nagamitsu
ED  - SpringerLink (Online service)
TI  - Vacuum Technology: Practice for Scientific Instruments 
SN  - 9783540744337 (electronic bk.)
AV  - TJ940 .Y678 2008
U1  - 621.55 22
PY  - 2008///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Vacuum technology
KW  - Scientific apparatus and instruments
KW  - Physics
KW  - Machinery and Machine Elements
KW  - Materials Science
KW  - Measurement Science, Instrumentation
KW  - Nanotechnology
KW  - Solid State Physics and Spectroscopy
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-3-540-74433-7
ER  -