Design and fabrication of a MEMS LC structure for a telemetry pressure and temperature sensor /
Mohsen Nabipoor
- Bangi : Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, 2008
- xviii, 186 p. : charts, ill. ; 30 cm.
Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008
References : p. [161]-166
Universiti Kebangsaan Malaysia--Dissertations
Dissertations, Academic--Malaysia Telemeter Microelectromechanical systems Microelectronics