Mack, Chris A. <br/><br/>
Fundamental principles of optical lithography :  the science of microfabrication / 
Chris Mack 
 - Chichester, England :  John Wiley & Sons,  2007 
 - xvii, 515 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470018934 (hbk.)  RM692.00 0470018933 (hbk.) 9780470727300 (pbk.) 0470727306 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction<br/>Microlithography--Industrial applications