TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - Mems and microsystems: design, manufacture, and packaging 
SN  - 9780470083017 (hbk.)
PY  - 2008///
CY  - Hoboken, N. J.
PB  - John Wiley & Sons
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip0716/2007017041.html
ER  -