Hsu, Tai-Ran <br/><br/>
Mems and microsystems :  design, manufacture, and packaging / 
Tai-Ran Hsu 
 - 2nd ed. 
 - Hoboken, N. J. :  John Wiley & Sons,  2008 
 - xxv, 550 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470083017 (hbk.)  RM415.02 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Microelectromechanical systems<br/>Microelectronic packaging