Optical inspection of microsystems / 
edited by Wolfgang Osten 
 - Boca Raton, FL :  CRC/Taylor & Francis,  2007 
 - 503 p., [8] p. of plates :  ill. (some col.) ;  26 cm. 
 - Optical science and engineering ;  109 .
 - Optical science and engineering (Boca Raton, Fla.) ;  109 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849336821 (alk. paper) 9780849336829  RM487.31 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Quality control--Optical methods<br/>Optical detectors--Industrial applications<br/>Microelectronics