TY  - BOOK
AU  - Azrul Azlan Hamzah
TI  - Sputtered silicon encapsulation: wafer level packaging for MEMs devices 
PY  - 2008///
CY  - Bangi
PB  - Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia
KW  - Universiti Kebangsaan Malaysia
KW  - Dissertations
KW  - Dissertations, Academic
KW  - Malaysia
KW  - Microelectronic packaging
KW  - Microelectromechanical systems
KW  - Microelectronic
N1  - Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008; References : p. [315] - 327
ER  -