Azrul Azlan Hamzah <br/><br/>
Sputtered silicon encapsulation :  wafer level packaging for MEMs devices / 
Azrul Azlan Bin Hamzah 
 - Bangi :  Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia,  2008 
 - xxxv, 338 p. :  ill. ;  30 cm. 
<br/><br/>Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008 
<br/><br/>References : p. [315] - 327 
<br/><br/><label>Subjects--Corporate Names: </label><br/>Universiti Kebangsaan Malaysia--Dissertations
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dissertations, Academic--Malaysia<br/>Microelectronic packaging<br/>Microelectromechanical systems<br/>Microelectronic