TY  - BOOK
AU  - Reinhardt,Karen A.
AU  - Kern,Werner
TI  - Handbook of silicon wafer cleaning technology
T2  - Materials science & process technology series
SN  - 9780815515548
PY  - 2008///
CY  - Norwich, New York
PB  - William Andrew
KW  - Silicon-on-insulator technology
N1  - Includes bibliographical references and index
ER  -