Handbook of silicon wafer cleaning technology / 
edited by Karen A. Reinhardt, Werner Kern 
 - 2nd ed. 
 - Norwich, New York :  William Andrew,  2008 
 - xxvi, 718 p. :  ill. ;  24 cm. 
 - Materials science & process technology series .
 - Materials science and process technology series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780815515548  RM881.46 0815515545 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon-on-insulator technology