TY  - BOOK
AU  - Jackson,Mark J.
ED  - SpringerLink (Online service).
TI  - Micro and Nanomanufacturing
SN  - 9780387261324 (electronic bk.)
PY  - 2007///
CY  - Boston, MA
PB  - Springer Science+Business Media, LLC
KW  - Microfabrication
KW  - Nanotechnology
KW  - Engineering
KW  - Mechanical Engineering
KW  - Electronics and Microelectronics, Instrumentation
KW  - Manufacturing, Machines, Tools
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/b136902
ER  -