Jackson, Mark J. <br/><br/>
Micro and Nanomanufacturing  [electronic resource] / 
by Mark J. Jackson. 
 - Boston, MA :  Springer Science+Business Media, LLC,  2007. 
 - x, 699 p. :  ill., digital ;  24 cm. 
<br/><br/><label>ISBN: </label>9780387261324 (electronic bk.) 9780387258744 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication.<br/>Nanotechnology.<br/>Engineering.<br/>Mechanical Engineering.<br/>Electronics and Microelectronics, Instrumentation.<br/>Manufacturing, Machines, Tools.