Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models - Bechtold, Tamara; Rudnyi, Evgenii B.; Korvink, J. G. (Jan G.); SpringerLink (Online service) (Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007)
Keywords: Microelectromechanical systems -- Mathematical models; Engineering; Electronics and Microelectronics, Instrumentation