Towards Synthesis of Micro-/Nano-systems The 11th International Conference on Precision Engineering (ICPE) August 16-18, 2006, Tokyo, Japan - International Conference on Precision Engineering 2006 : Tokyo, Japan); Kimura, Fumihiko; Horio, Kenichiro; SpringerLink (Online service) (London : Springer-Verlag London Limited, 2007)
Keywords: Production engineering -- Congresses; Microtechnology -- Congresses; Nanotechnology -- Congresses; Engineering; Nanotechnology; Control Engineering; Industrial and Production Engineering; Manufacturing, Machines, Tools; Operating Procedures, Materials Treatment; Computer-Aided Engineering (CAD, CAE) and Design