Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice - Giannuzzi, Lucille A.; Stevie, Fred A.; SpringerLink (Online service) (Boston, MA : Springer Science+Business Media, Inc., 2005)
Keywords: Focused ion beams; Physics; Optical and Electronic Materials; Surfaces and Interfaces, Thin Films; Condensed Matter; Solid State Physics and Spectroscopy