TY  - BOOK
AU  - Lobontiu,Nicolae
AU  - Garcia,Ephrahim
ED  - SpringerLink (Online service)
TI  - Mechanics of Microelectromechanical Systems
SN  - 9780387230375 (electronic bk.)
AV  - TK7875 .L63 2005
U1  - 621 22
PY  - 2005///
CY  - Boston, MA
PB  - Springer Science + Business Media, Inc.
KW  - Microelectromechanical systems
KW  - Engineering
KW  - Mechanical Engineering
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b100026
ER  -