Integrated Chemical Microsensor Systems in CMOS Technology - Hierlemann, Andreas; Baltes, H..; Fujita, Hiroyuki; Liepmann, Dorian; SpringerLink (Online service) (Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005)
Keywords: Metal oxide semiconductors, Complementary; Microelectromechanical systems; Sensorimotor integration; Chemistry; Optical and Electronic Materials; Nanotechnology; Surfaces and Interfaces, Thin Films; Electronics and Microelectronics, Instrumentation; Analytical Chemistry; Measurement Science, Instrumentation