Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures - Fruhauf, Joachim; SpringerLink (Online service) (Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005)
Keywords: Silicon; Detectors; Chemistry; Optical and Electronic Materials; Ceramics, Glass, Composites, Natural Methods; Microwaves, RF and Optical Engineering; Electronics and Microelectronics, Instrumentation; Industrial Chemistry/Chemical Engineering