TY  - BOOK
AU  - Setter,Nava
ED  - SpringerLink (Online service)
TI  - Electroceramic-Based MEMS: Fabrication-Technology and Applications 
SN  - 9780387233192 (electronic bk.)
AV  - TK7875 .E42 2005
U1  - 621.381 22
PY  - 2005///
CY  - Boston, MA
PB  - Springer Science+Business Media, Inc.
KW  - Microelectromechanical systems
KW  - Chemistry
KW  - Optical and Electronic Materials
KW  - Nanotechnology
KW  - Characterization and Evaluation Materials
KW  - Ceramics, Glass, Composites, Natural Methods
KW  - Electronics and Microelectronics, Instrumentation
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/b101200
ER  -