Electroceramic-Based MEMS Fabrication-Technology and Applications - Setter, Nava.; SpringerLink (Online service) (Boston, MA : Springer Science+Business Media, Inc., 2005)
Keywords: Microelectromechanical systems; Chemistry; Optical and Electronic Materials; Nanotechnology; Characterization and Evaluation Materials; Ceramics, Glass, Composites, Natural Methods; Electronics and Microelectronics, Instrumentation