Electroceramic-Based MEMS  Fabrication-Technology and Applications /  [electronic resource] : 
edited by Nava Setter. 
 - Boston, MA :  Springer Science+Business Media, Inc.,  2005. 
 - xii, 414 p. :  ill., digital ;  25 cm. 
 - Electronic Materials: Science and Technology,  9  1386-3290 ; .
<br/><br/><label>ISBN: </label>9780387233192 (electronic bk.) 9780387233109 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Chemistry.<br/>Optical and Electronic Materials.<br/>Nanotechnology.<br/>Characterization and Evaluation Materials.<br/>Ceramics, Glass, Composites, Natural Methods.<br/>Electronics and Microelectronics, Instrumentation.
<br/><br/><label>LC Class. No.: </label>TK7875  / .E42 2005 
<br/><br/><label>Dewey Class. No.: </label>621.381