TY  - BOOK
AU  - Behrisch,Rainer
AU  - Eckstein,Wolfgang
ED  - SpringerLink (Online service)
TI  - Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies 
SN  - 9783540445029 (electronic bk.)
AV  - QC176.8.S72 S685 2007
U1  - 530.416 22
PY  - 2007///
CY  - Berlin Heidelberg
PB  - Springer-Verlag GmbH.
KW  - Sputtering (Physics)
KW  - Chemistry
KW  - Atoms and Molecules in Strong Fields, Plasma Physics
KW  - Surfaces and Interfaces, Thin Films
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://dx.doi.org/10.1007/978-3-540-44502-9
ER  -