Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies - Behrisch, Rainer; Eckstein, Wolfgang; SpringerLink (Online service) (Berlin Heidelberg : Springer-Verlag GmbH., 2007)
Keywords: Sputtering (Physics).; Chemistry; Atoms and Molecules in Strong Fields, Plasma Physics; Surfaces and Interfaces, Thin Films