Sputtering by Particle Bombardment  Experiments and Computer Calculations from Threshold to MeV Energies /  [electronic resource] : 
edited by Rainer Behrisch, Wolfgang Eckstein. 
 - Berlin Heidelberg :  Springer-Verlag GmbH.,  2007. 
 - xvii, 507 p. :  ill. (some col.), digital ;  21 cm. 
 - Topics in Applied Physics,  110  0303-4216 ; .
<br/><br/><label>ISBN: </label>9783540445029 (electronic bk.) 9783540445005 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sputtering (Physics).<br/>Chemistry.<br/>Atoms and Molecules in Strong Fields, Plasma Physics.<br/>Surfaces and Interfaces, Thin Films.
<br/><br/><label>LC Class. No.: </label>QC176.8.S72  / S685 2007 
<br/><br/><label>Dewey Class. No.: </label>530.416