TY  - BOOK
AU  - Badariah Bais
TI  - Low-G area-changed MEMs accelerometer with bulk silicon technique: design, simulation and testing 
PY  - 2007///
CY  - Bangi
PB  - Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia
KW  - Universiti Kebangsaan Malaysia
KW  - Dissertations
KW  - Dissertations, Academic
KW  - Malaysia
KW  - Microelectromechanical systems
KW  - Accelerometers
N1  - Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2007; References : p. [231]-240
ER  -