TY  - BOOK
AU  - Alford,Terry L.
AU  - Feldman,Leonard C.
AU  - Mayer,James W.
TI  - Fundamentals of nanoscale film analysis
SN  - 9780387292601 (hbk.)
PY  - 2007///
CY  - New York, N.Y.
PB  - Springer
KW  - Thin films
KW  - Nanostructured materials
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/fy0713/2005933265.html
ER  -