TY  - BOOK
AU  - Varadan,V.K.
AU  - Vinoy,K.J.
AU  - Gopalakrishnan,S.
TI  - Smart material systems and MEMS: design and development methodologies 
SN  - 0470093617 (cloth : alk. paper)
PY  - 2006///
CY  - Chichester, England
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Smart materials
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip0612/2006012610.html
UR  - http://www.loc.gov/catdir/enhancements/fy0654/2006012610-d.html
ER  -