TY  - BOOK
AU  - Banks,Danny
TI  - Microengineering, MEMS, and interfacing: a practical guide 
T2  - Mechanical engineering
SN  - 0824723058 (alk. paper)
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC/Taylor & Francis
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0648/2006042635-d.html
ER  -