Banks, Danny <br/><br/>
Microengineering, MEMS, and interfacing :  a practical guide / 
Danny Banks 
 - Boca Raton, FL :  CRC/Taylor & Francis,  2006 
 - 326 p. :  ill. ;  24 cm. 
 - Mechanical engineering ;  199 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824723058 (alk. paper)  RM551.13 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems