Mohd. Salleh Ismail <br/><br/>
Technology and application of aligned wafer bonding for three dimensional microstructures and microdevices  [microform] / 
by Mohd Salleh Ismail 
 - Davis, Calif.  Perpustakaan Tun Seri Lanang,  2006 
 - 1 microfilm reel ;  35 mm. 
<br/><br/>Thesis (Doctor of Philosophy) - University of California, 1993 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor wafers<br/>Integrated circuits--Water--scale integration