TY  - BOOK
AU  - Nalwa,Hari Singh
TI  - Handbook of thin film materials
SN  - 0125129084 (set 5 volume 3 copies)
PY  - 2002///
CY  - San Diego, CA
PB  - Academic Press
KW  - Thin films
KW  - Handbooks, manuals, etc
N1  - Includes bibliographical references and indexes; v. 1; Deposition and processing of thin films --; v. 2; Characterization and spectroscopy of thin films --; v. 3; Ferroelectric and dielectric thin films --; v. 4; Semiconductor and superconductor thin films --; v. 5; Nanomaterials and magnetic thin films
UR  - http://www.loc.gov/catdir/toc/els031/2001090614.html
ER  -