Handbook of thin film materials - Nalwa, Hari Singh, 1954- (San Diego, CA : Academic Press, 2002)
v. 1. Deposition and processing of thin films -- v. 2. Characterization and spectroscopy of thin films -- v. 3. Ferroelectric and dielectric thin films -- v. 4. Semiconductor and superconductor thin films -- v. 5. Nanomaterials and magnetic thin films
Includes bibliographical references and indexes
Keywords: Thin films -- Handbooks, manuals, etc