Mechanical design of microresonators : modeling and applications /
Nicolae Lobontiu
- New York : McGraw-Hill, 2006
- xiii, 342 p. : ill. ; 23 cm.
- McGraw-Hill nanoscience and technology series .
Includes bibliographical references and index
0071455388 RM580.80
Microelectromechanical systems--Design and construction Electric resonators--Design and construction Vibrators--Design and construction Detectors--Design and construction