Micro process engineering :  fundamentals, devices, fabrication, and applications / 
volume editor : Norbert Kockmann 
 - Weinheim :  Wiley-VCH ,  2006 
 - xxii, 507 p. :  ill. ;  24 cm. 
 - Advanced micro & nanosystems ;  5 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>3527312463 (hbk.)  RM892.80 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Production engineering<br/>Microtechnology