TY  - BOOK
AU  - Leondes,Cornelius T.
TI  - MEMS/NEMS: handbook techniques and applications  
SN  - 0387245200
PY  - 2005///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Nanotechnology
N1  - Includes bibliographical references and index; v. 1; Design methods  --; v. 2; Fabrication techniques --; v. 3; Manufacturing methods --; v. 4; Sensors and actuators --; v. 5; Medical applications
ER  -