MEMS/NEMS : handbook techniques and applications - Leondes, Cornelius T. (New York : Springer, 2005)
v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications
Includes bibliographical references and index
Keywords: Microelectromechanical systems -- Design and construction; Nanotechnology