MEMS/NEMS :  handbook techniques and applications  / 
edited by Cornelius T. Leondes 
 - New York :  Springer,  2005 
 - 5 v. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/> Design methods  --  Fabrication techniques --  Manufacturing methods --  Sensors and actuators --  Medical applications  v. 1.  v. 2.  v. 3.  v. 4.  v. 5. 
<br/><br/><label>ISBN: </label>0387245200  RM4,479.28 (5 Vol. set) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction<br/>Nanotechnology