Birkholz, Mario. Thin film analysis by x-ray scattering / Mario Birkholz ; with contributions by Paul F. Fewster, Christoph Genzel. - Weinheim : Wiley-VCH, 2006. - xxii, 356 p. : ill. ; 25 cm. ISBN: 3527310525 RM373.18 Subjects--Topical Terms: Thin films--Analysis.X-ray spectroscopy.