TY  - BOOK
AU  - Machlin,E.S.
TI  - Materials science in microelectronics
SN  - 008044640X (v. 1)
PY  - 2005///-
CY  - Amsterdam
PB  - Elsevier
KW  - Thin films
KW  - Microelectronics
N1  - Includes index; vol. 1; The relationships between thin film processing and structure
UR  - http://www.loc.gov/catdir/enhancements/fy0629/2005934958-d.html
ER  -